• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A pressure measuring device (1) comprising a pressure sensor of a first type (2) and a pressure sensor of a second type (3) different from the first one mounted on a common support (6) to be subjected to a same pressure. Calibration method associated with the device (1).
    公开号:FR3037142A1
    申请号:FR1555042
    申请日:2015-06-03
    公开日:2016-12-09
    发明作者:Jean-Christophe Riou；Eric Bailly
    申请人:Sagem Defense Securite SA；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to the field of pressure measurement and more particularly to electromechanical fluid pressure sensors for aeronautical applications, and in particular MEMS type sensors. BACKGROUND OF THE INVENTION An electromechanical pressure sensor generally comprises a silicon or silicon alloy membrane on the front side of which are reported Wheatstone bridge piezoelectric deformation gauges and connected to an electronic processing unit by means of electrodes. connection wires. The rear face opposite the one carrying the gauges is subjected to a pressure to be measured which, by deforming the membrane, solicits the gauges and makes it possible to measure the pressure electrically. The membrane is generally mounted on a substrate also silicon. Since silicon is particularly sensitive to electrochemical attacks, the membrane is mounted at one end of a pipe filled with a transfer fluid, generally silicone oil. The other end of the conduit is closed by a stainless steel pellet whose outer face is in contact with the fluid whose pressure is to be measured.
    [0002] The pressure applied to the stainless steel pellet is transmitted, via the transfer fluid, to the silicon membrane and measured by the processing unit from the signals provided by the strain gauges. The electrical signal generated by the processing unit is then transmitted to a communication network. The sensor thus obtained is generally bulky, heavy and expensive, in particular because of the presence of the oil filled duct and the associated sealing elements. Indeed, the oil must be absolutely incompressible, and such oils are expensive and freeze at low temperature to the point of transmitting vibrations. In cases where they are not completely free of impurities and / or free radicals, these oils 5 generate electric drifts when subjected to an electrical voltage. The filling of the cylindrical conduit must be carried out extremely rigorously because the presence of air in the conduit would make the sensor inaccurate, or even inoperative. This operation and its control increase the production costs of the sensor. The sensor membrane is usually attached to the sensor support by gluing or brazing. This junction must be sealed to prevent any intrusion of fluid under the membrane, which would ruin the sensor over time. Such an operation suffers from the variability associated with a manual embodiment and is a recurrent source of defect. Finally, such a sensor is extremely sensitive to rapid changes in the temperature of the fluid whose pressure is to be measured. Indeed, although piezoelectric sensors are notoriously known to have a reduced sensitivity to temperature variations, the behaviors of the transfer fluid and the duct induce errors that are difficult to compensate. Finally, at extremely low temperatures, the transfer fluid can freeze and render the sensor inoperative. Resistive sensors require regular calibration to maintain an acceptable level of accuracy, particularly because of their thermal sensitivity.
    [0003] Calibration of a piezoelectric sensor generally requires a calibrated measurement device to be connected to its terminals and thus to be physically accessible to the sensor. Such an operation requires the immobilization of the equipment on which the sensor is mounted, which leads to particularly detrimental downtimes particularly in the case of sensors mounted on aircraft. Finally, a malfunction of a piezoelectric sensor may be difficult to distinguish from a fault in the transmission circuit. It is then necessary to provide local systems for monitoring the operation. OBJECT OF THE INVENTION The object of the invention is to reduce the cost and thermal sensitivity of an electromechanical pressure measuring device while improving reliability and accuracy. SUMMARY OF THE INVENTION For this purpose, it is provided, according to the invention, a pressure measuring device comprising a pressure sensor 15 of a first type and a pressure sensor of a second type different from the first which are mounted on a common support to be subjected to the same pressure. It is then possible to exploit the specific properties of each sensor, especially when they have reduced sensitivities to certain environmental parameters such as temperature, humidity, speed, centrifugal force or other types of sensor. solicitations.
    [0004] Advantageously, the pressure sensor of the first type and the pressure sensor of the second type have different failure modes. Since the failure modes are different, a significant measurement difference between the sensors 30 is indicative of a failure of one of the sensors. A measurement difference will be considered significant when it is greater than the expected measurement error of each sensor. According to a particular embodiment, the pressure sensor of the first type and the pressure sensor of the second type have different precision ranges. Thus, it is possible to exploit the specific precision ranges of the various types of sensors. Advantageously, in the case where one of the sensors is of capacitive type and the second is of resistive type, the measurements made by the capacitive sensor are slightly influenced by the temperature of the fluid whose pressure is measured. The resistive sensor, meanwhile, allows independent measurements of the inertial forces to which it is subjected, which is particularly advantageous in the case of wheel pressure sensors. A good compactness of the measuring device can be obtained by mounting a processing unit on the common support and connecting it to the pressure sensors 15 of the first type and the second type. This embodiment also makes it possible to connect the sensors with the processing unit in an automated way at the factory rather than manually making them when mounting the device, which makes it possible to reduce the sensitive operations of assembly and helps to reduce the cost of installing the device. Advantageously, the pressure sensor of the first type and the pressure sensor of the second type are respectively mounted on opposite faces of the common support. This configuration makes it possible to use protection modes (coating, shield) adapted to the specificities of the sensors by treating each surface in their entirety. The processing unit can then be mounted on the first face of the common support near one of the sensors and receive the same protective treatment as the latter. Advantageously, one of the faces of the common support comprises at least one portion coated with parylene or with a carbon-like coating of the DLC type ("Diamond Like Carbon"). These coatings make it possible to ensure effective protection of the sensors in the case of the measurement of the pressure of corrosive fluids OR in an aggressive medium.
    [0005] According to a particular embodiment, one of the pressure sensors is enclosed under a hermetic lid secured to the common support. This makes it possible to define and isolate the portion of the support surface carrying this sensor which is subjected to the pressure of the fluid whose pressure is to be measured. According to another embodiment, the pressure sensor of the first type comprises at least one membrane and a first internal channel passing through the common support, a second internal channel for supplying a fluid to the membrane being in fluid connection with the first internal channel. This configuration makes it possible to propose a device of which only the face opposite the first type sensor can be subjected to the fluid whose pressure is to be measured.
    [0006] One or both of the pressure sensors can be connected to wireless communication means, enabling remote interrogation without any disassembly and thus reducing immobilization. The low power consumption of the capacitive type sensors is particularly suitable for such a mode of communication. The invention also relates to a method for calibrating such a pressure measuring device comprising at least a pressure sensor of a first type and a pressure sensor of a second type mounted on the same support, the method comprising the step of comparing the measurement made by one of the sensors with a measurement of the same pressure made by the other sensor. Thus, it is possible to calibrate in real time each of the sensors by retaining the measurement of one or the other of the sensors according to whether one is in a situation in which it is It is known that the measurement of one sensor is more reliable than that of another. The method may also include an additional step of issuing an integrity alert in the case where a comparison of the measurements made by each of the sensors makes it possible to suspect that one of these is defective. BRIEF DESCRIPTION OF THE DRAWINGS Reference is made to the accompanying drawings, in which: FIG. 1 is a diagrammatic sectional view of a first embodiment of a pressure measuring device according to the invention; FIG. 2 is a logic diagram of the various steps of the calibration method according to the invention; FIG. 3 is a view identical to that of FIG. 1 of a second embodiment of a pressure measuring device according to the invention; FIG. 4 is a view identical to that of FIG. 1 of a third embodiment of a pressure measuring device according to the invention. DETAILED DESCRIPTION OF THE INVENTION Referring to FIG. 1, the pressure measuring device according to the invention, generally designated 1, comprises a capacitive type pressure sensor 2 and a piezoelectric type pressure sensor 3 respectively. - Actually mounted on a first face 4 and a second face 5, opposite, a common support 6. The support 6 is here in silicon and receives on its first face 4 a processing unit 7 connected by means of a first conductive wire 35 at one end of a conductive track printed on the surface 4. The first lead wire 10 has a second opposite end which is connected to a second lead wire 12 connected to the pickup 2. A third lead 13 connects the processing unit 7 to an inner conductive track 14 which passes through the holder 6 from the first face 4 to the second face 5 and connects the sensor 3 to the processing unit 7. The processing unit 7, here an integrated unit ASIC type (of the English "Application Specific integrated 10 Unit") , is arranged to deliver an electrical signal according to the impedance values (resistance of the sensor 3, capacity of the capacitor 2) measured across the sensors 2 and 3. The processing unit 7 is also arranged to perform log operations ics on the measured impedances. The processing unit 7 is also connected by a fourth lead wire 15 to a Bluetooth module 16 and a fifth lead wire 17 to an external wire transmission circuit (not shown).
    [0007] The first face 4 of the support 6 receives a coating 40 of parylene which then covers the sensor 2, the conductive wires 10, 12, 13 and 15 as well as the processing unit 7 and the Bluetooth module 16. The carbon coatings DLC type - "Diamond Like Cargo" - are also suitable for the protection of the first face 4 of the support 6, the sensor 2, the conductive wires 10, 12, 13 and 15 as well as of the processing unit 7 and the Bluetooth module 16. The sensor 2 has the shape of a right cylinder and 30 comprises a base 20 integral with the support 6. A central foot 21 projects from the base 20 to join the first face 22 of a silicon substrate 23. The substrate 23 comprises, on its second face 24 opposite the first face 22, a first electrode 25 and a deformable membrane 26 which extends opposite and at a distance d from the second face 24 of the substrate 23. The deformable membrane 26 is made of silicon and comprises an electrode 27 extending opposite the electrode 25. The deformable membrane 26 comprises a ring-shaped peripheral bulge 28 having a planar junction portion at its bottom portion. contact with the second face 24 of the substrate 23. The deformable membrane 26, its bulge 28 and the second face 24 of the substrate 23 define a sealed enclosure 30 which surrounds the first electrode 25. The sealed enclosure 30 is at a pressure absolute substantially zero. In operation, the pressure measuring device 1 is placed in the fluid whose pressure P is to be measured. The pressure P is then exerted on the capacitive capacitor 2 and on the piezoelectric sensor 3 through the coating 40. Under the effect of the pressure P, the membrane 26 is deformed and the distance d separating the first electrode 25 the second electrode 27 varies. The impedance Z2 (essentially capacitive) of the capacitor formed by the pair of electrodes 25, 27 is then modified and transmitted to the processing unit 7 via the conductive wires 10, 12 and the conductive track 11. Internal conductive track 14 allows the processing unit 7 to measure the impedance Z3 (essentially resistive) of the piezoelectric sensor 3. The processing unit 7 then converts these values into one or more electrical signals which it can transmit to a wired transmission circuit via the wire 17 or by wireless communication using the Bluetooth module 16.
    [0008] The foot 21 leaves the thermal expansion of the sensor 2 free, which reduces the thermomechanical stresses and makes it possible to reduce the thermal sensitivity of the device 1. With reference to FIG. 2, the processing unit 35 7, after having carried out the measurements respective impedances Z2 and Z3 of the sensors 2 and 3 (step 50) converts these respectively to electrical signals E2 and E3 representative of the measured pressure (step 51). In the flight situation, in which the piezoelectric sensor 3 is supposed to be the most reliable, the processing unit 7 compares the signal E2 with the signal E3 (step 52). If the difference between the values E2 and E3 is greater than a first threshold S1 (step 53), the value of the signal E2 from the piezoelectric sensor 3 is used to reset the zero of the capacitive sensor 2 (step 54). If the difference between the values E2 and E3 is greater than a second threshold S2 (step 55), the processing unit 7 then issues an integrity alert 57 (step 56). This integrity alert 57 can be transmitted in the form of a Bluetooth signal via the Bluetooth module 16 or transmitted to the wired transmission circuit by the conducting wire 17. Of course, the method can also be implemented in other situations (very high, very low temperatures, aircraft on the ground, while taxiing, etc.) in which one or other of the sensors 2 and 3 is used as a reference for calibrating or detecting a failure. Elements identical or similar to those previously described will bear a numerical reference identical to them in the description which follows of the second and third embodiments of the invention. With reference to FIG. 3, the sensor 2 comprises, here, a first internal channel 30 which extends in the foot 21 from an orifice 31 of the second face 5 of the support 6 and which passes through the base 20 as well as the support 6 to supply two second channels 33 extending through the substrate 23 and the bulge 28. A lid 34 comes into contact with a planar upper portion of the junction of the membrane 26 and extends opposite it. . The lid 34 then delimits with the bulge 28 and the membrane 26 a sealed chamber 35 into which the channels 33 open. The first face 4 of the support 6 receives a parylene coating which then also covers the sensor 2, the conductive wires 10, 12, 13 and 15 as well as the processing unit 7 and the Bluetooth module 16. Alternatively, and as shown in FIG. 4, the sensor 2 can be surrounded by a metal cover 36 secured to the first face 4 of the support 6 A chamber 37 may be at a substantially zero absolute pressure or filled with a neutral gas such as nitrogen. The portion of the face 4 of the support 6 comprising the processing unit 7 is, in turn, covered with parylene. In this case, the conductive track 11 is replaced by an internal conductive track 38 extending into the support 6. This configuration of the measuring device 1 in which the sensor 2 is supplied with pressurized fluid via the orifice 31 makes it possible to submit only one of the two faces of the support 6 to the pressure of the fluid to be measured (here the face 5) while carrying out measurements which implement the sensors 2 and 3 located on its two faces 4 and 5.
    [0009] As used herein, the term electrodes refers to any electrically conductive element. It then covers an element attached to a substrate or membrane and a portion of substrate or membrane (or its entirety) having electrical properties enabling it to define a capacitor electrode. An at least partly conducting ceramic membrane is therefore an electrode within the meaning of the present application. Of course, the invention is not limited to the embodiments described but encompasses any variant within the scope of the invention as defined by the claims. In particular: - although here the substrate of the sensor is in silicon, the invention is also applicable to other types of substrate such as for example a substrate of silicon alloy, multilayer ceramic with simultaneous cooking with high temperature (HTCC) or low temperature simultaneous cooking multilayer ceramic (LTCC); Although the deformable membrane here is made of silicon, the invention is also applicable to other types of membranes such as, for example, a ceramic membrane; although here the periphery of the deformable membrane is defined by an annular bulge, the invention also applies to a periphery formed differently, for example a wall of rectangular section or peripheral struts glued to the substrate and / or to the membrane; - Although here the sensor comprises two channels 20 bringing the pressurized fluid from the first channel through the support to the deformable membrane, the invention also applies to a single channel for supplying the pressurized fluid up to to formable or more than two channels; 25 - although here, the processing unit located on the first face of the support, membrane is an ASIC the invention also applies to other processing means such as for example a microcontroller, the latter being able to be located on any of the faces of the support; 30 - although here, the electrical connections of the processing unit to the capacitive sensor and to the Bluetooth module comprise internal conductive tracks printed on the support and of conducting wires, the invention also applies to other means of Connection which may comprise, for example, internal conductive tracks extending in the deformable membranes; although here, a central fixing leg makes it possible to attenuate the thermomechanical stresses on the sensor, the invention also applies to other types of thermomechanical stress attenuation devices such as for example elastic; although here the processing unit is connected to a Bluetooth module, the invention also applies to other wireless communication means such as, for example, wifi, radio wave or infrared communication means; although here the processing unit 7 issues an integrity alert when the difference between the pressure values measured by each sensor is greater than a predefined threshold, the method according to the invention also applies to other types of events generating an integrity alert, such as, for example, a variation of the value measured by one of the sensors that would not be recorded by the other sensor or a difference in reaction time of the sensors greater than a predetermined value; although here the first type of pressure sensor is a capacitive type sensor and the second type of pressure sensor is a piezoelectric type sensor, the invention also applies to other types of sensors and their combinations, such as piezoresistive or resonant type sensors.
    权利要求:
    Claims (14)
    [0001]
    REVENDICATIONS1. Pressure measuring device (1) comprising a pressure sensor of a first type (2) and a pressure sensor of a second type (3) different from the first one mounted on a common support (6) to be subjected to at the same pressure.
    [0002]
    2. Device (1) according to claim 1, wherein the pressure sensor of the first type (2) is capacitive type.
    [0003]
    3. Device (1) according to any one of the preceding claims, wherein the pressure sensor of the second type (3) is of the resistive type.
    [0004]
    4. Device (1) according to claim 1, wherein the pressure sensor of the first type (2) and the pressure sensor of the second type (3) have different failure modes.
    [0005]
    5. Device (1) according to claim 1, wherein the pressure sensor of the first type (2) and the pressure sensor of the second type (3) have different precision ranges.
    [0006]
    6. Device (1) according to claim 1, comprising a processing unit (7) mounted on the common support (6) and connected to the pressure sensors (2; 3).
    [0007]
    Device (1) according to claim 1, in which the pressure sensor of the first type (2) and the pressure sensor of the second type (3) are mounted respectively on opposite faces (4, 5) of the common support ( 6).
    [0008]
    8. Device (1) according to claim 1, wherein one of the faces (4) of the common support (6) comprises at least one portion covered with parylene.
    [0009]
    9. Device (1) according to claim 1 wherein one of the pressure sensors (2; 3) is enclosed under a hermetic cover (36) integral with the common support (6).
    [0010]
    10. Device (1) according to claim 2, wherein the pressure sensor of the first type (2) comprises at least one membrane (26) and a first internal channel (30) passing through the common support (6). ), a second internal channel (33) for supplying a fluid to the membrane (26) being in fluid connection with the first internal channel (30).
    [0011]
    Apparatus (1) according to claim 1, wherein one of the pressure sensors (2; 3) is connected to wireless communication means (16).
    [0012]
    12. A method of calibrating a pressure measuring device (1) comprising at least a pressure sensor of a first type (2) and a pressure sensor of the first type (3) mounted on the same support (6), the method comprising step 52) comparing the measurement made by one of the sensors (2, 3) with a measurement of the same pressure made by the other sensor (2, 3).
    [0013]
    The method of claim 12, wherein the value of the pressure measured by one of the sensors (2; 3) is used to reset the zero of the other sensor.
    [0014]
    The method of claim 12 including the further step (56) of issuing an integrity alert.
    类似技术:
    公开号 | 公开日 | 专利标题
    EP3304020B1|2019-04-24|Pressure sensing device
    EP3304022B1|2021-11-03|Pressure-measuring device with improved reliability and associated calibration method
    US7258018B2|2007-08-21|High accuracy, high temperature, redundant media protected differential transducers
    US7275444B1|2007-10-02|Pressure transducer apparatus adapted to measure engine pressure parameters
    FR2858053A1|2005-01-28|Pressure sensor for combustion chamber of vehicle internal combustion engine, has steel sensor membrane whose rear side includes thin metallic layer receiving piezo-resistive measuring units connected by transmission units
    FR2983955A1|2013-06-14|PRESSURE SENSOR FOR FLUID
    FR3035209A1|2016-10-21|MULTIFUNCTION PROBE FOR PRIMARY REFERENCES FOR AIRCRAFT, MEASUREMENT SYSTEM, AIRCRAFT AND METHOD FOR OBTAINING PHYSICAL SIZES
    WO2012038375A1|2012-03-29|Low-cost pressure and temperature sensor comprising saw resonators, and method for manufacturing same
    JP6920967B2|2021-08-18|Methods and devices for pressure sensor compensation
    FR2553885A1|1985-04-26|PRESSURE MEASURING DEVICE
    CN107782485B|2021-09-21|Differential pressure sensor integrated with common mode error compensation
    CA2894577C|2021-08-31|Improved pressure sensor comprising a hermetic casing
    EP3234535A1|2017-10-25|Pressure sensor suited to measuring pressure in an aggressive environment
    FR3043202A1|2017-05-05|PRESSURE MEASURING DEVICE
    EP3690405A1|2020-08-05|Sensor for measuring a first physical quantity, the measurement of which is influenced by a second physical quantity
    FR3037141A1|2016-12-09|PRESSURE DETECTION DEVICE
    FR3060119B1|2019-07-26|CONTACTLESS DEVICE FOR MEASURING THE PRESSURE OF A FLUID CIRCULATING IN A PIPING SYSTEM
    EP3388808B1|2019-10-02|Device for detecting pressure with mechanical uncoupling
    US11015994B2|2021-05-25|Differential MEMS pressure sensors with a ceramic header body and methods of making differential MEMS pressure sensors
    FR3037146A1|2016-12-09|PRESSURE MEASURING DEVICE
    FR2577656A1|1986-08-22|Device for checking the amount of gas filling a vessel
    FR3036484A1|2016-11-25|DETECTOR AND METHOD OF MANUFACTURING THE SAME
    同族专利:
    公开号 | 公开日
    CN107690573A|2018-02-13|
    EP3304022B1|2021-11-03|
    US10634569B2|2020-04-28|
    WO2016193484A1|2016-12-08|
    US20180292281A1|2018-10-11|
    EP3304022A1|2018-04-11|
    CN107690573B|2020-06-16|
    FR3037142B1|2018-11-02|
    US20200064217A1|2020-02-27|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US4222277A|1979-08-13|1980-09-16|Kulite Semiconductor Products, Inc.|Media compatible pressure transducer|
    US4995014A|1990-01-29|1991-02-19|Sparton Corporation|Low frequency hydrophone and depth sensor assembly|
    WO2007031516A1|2005-09-16|2007-03-22|Siemens Aktiengesellschaft|Pressure measurement transducer|
    EP2637007A1|2012-03-08|2013-09-11|Nxp B.V.|MEMS capacitive pressure sensor|
    US20130333440A1|2012-06-19|2013-12-19|Robert C. Hedtke|Differential pressure transmitter with pressure sensor|
    DE202014103355U1|2014-07-22|2014-08-19|Infineon Technologies Ag|An apparatus and a system for detecting a physical quantity|
    US4730496A|1986-06-23|1988-03-15|Rosemount Inc.|Capacitance pressure sensor|
    JPH07239281A|1994-02-28|1995-09-12|Tokin Corp|Electrostatic capacitance type pressure sensor|
    US6518084B1|1998-12-15|2003-02-11|Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.|Method of producing a micromechanical structure for a micro-electromechanical element|
    SE0001213D0|2000-04-04|2000-04-04|Patrik Melvaas|Sensing device|
    US7043960B1|2004-06-17|2006-05-16|The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration|Self-calibrating pressure transducer|
    US7093494B2|2004-10-18|2006-08-22|Silverbrook Research Pty Ltd|Micro-electromechanical pressure sensor|
    US7538401B2|2005-05-03|2009-05-26|Rosemount Aerospace Inc.|Transducer for use in harsh environments|
    CN100419397C|2005-06-14|2008-09-17|探微科技股份有限公司|Method for correcting zero offset voltage of pressure transducer|
    EP1970688A3|2007-03-16|2010-06-23|CSEM Centre Suisse d'Electronique et de Microtechnique SA Recherche et Développement|Pressure measurement device and method for manufacturing and using the same|
    US7980145B2|2007-12-27|2011-07-19|Y Point Capital, Inc|Microelectromechanical capacitive device|
    KR20120139262A|2011-06-17|2012-12-27|엔에이치엔|System, method and computer readable recording medium for providing a ranking about game group|
    US9176089B2|2013-03-29|2015-11-03|Stmicroelectronics Pte Ltd.|Integrated multi-sensor module|
    US20170209056A1|2014-04-07|2017-07-27|University Of Washington|Implantable self-calibrating sensor assemblies and associated methods|
    US9689770B2|2014-07-17|2017-06-27|Infineon Technologies Ag|Selfcalibration of capacitive pressure sensors with electrostatic forces|
    FR3037140B1|2015-06-03|2017-06-02|Sagem Defense Securite|PRESSURE DETECTION DEVICE|
    IT201600121210A1|2016-11-30|2018-05-30|St Microelectronics Srl|MULTI-DEVICE TRANSDUCTION MODULE, ELECTRONIC EQUIPMENT INCLUDING THE TRANSDUCTION FORM AND METHOD OF MANUFACTURING THE TRANSDUCTION MODULE|
    DE102017211970A1|2017-07-12|2019-01-17|Infineon Technologies Ag|Sensor arrangement and method for testing a sensor arrangement|AU2020284116A1|2019-05-30|2022-01-06|AirFlow Direction, Inc.|Directional differential pressure detector|
    US11149582B2|2019-10-16|2021-10-19|Pratt & Whitney Canada Corp.|Health monitoring for multi-channel pressure transducers|
    CN112924089B|2021-02-02|2022-03-01|同济大学|Intelligent automatic test system, method and device suitable for pressure gauge|
    法律状态:
    2016-05-24| PLFP| Fee payment|Year of fee payment: 2 |
    2016-12-09| PLSC| Publication of the preliminary search report|Effective date: 20161209 |
    2017-05-23| PLFP| Fee payment|Year of fee payment: 3 |
    2018-05-25| PLFP| Fee payment|Year of fee payment: 4 |
    2018-06-15| CD| Change of name or company name|Owner name: SAFRAN ELECTRONICS & DEFENSE, FR Effective date: 20180515 |
    2020-05-20| PLFP| Fee payment|Year of fee payment: 6 |
    2021-05-19| PLFP| Fee payment|Year of fee payment: 7 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1555042|2015-06-03|
    FR1555042A|FR3037142B1|2015-06-03|2015-06-03|PRESSURE MEASURING DEVICE WITH IMPROVED RELIABILITY AND ASSOCIATED CALIBRATION METHOD|FR1555042A| FR3037142B1|2015-06-03|2015-06-03|PRESSURE MEASURING DEVICE WITH IMPROVED RELIABILITY AND ASSOCIATED CALIBRATION METHOD|
    US15/578,676| US10634569B2|2015-06-03|2016-06-03|Pressure-measuring device with improved reliability and associated calibration method|
    PCT/EP2016/062731| WO2016193484A1|2015-06-03|2016-06-03|Pressure-measuring device with improved reliability and associated calibration method|
    EP16728901.6A| EP3304022B1|2015-06-03|2016-06-03|Pressure-measuring device with improved reliability and associated calibration method|
    CN201680032562.1A| CN107690573B|2015-06-03|2016-06-03|Pressure measurement device with improved reliability and associated calibration method|
    US16/673,181| US20200064217A1|2015-06-03|2019-11-04|Pressure-measuring device with improved reliability and associated calibration method|
    [返回顶部]